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? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com page 1 crm200-00-0100-132 rev 5 features ? small (6.3 x 5.5 x 2.7mm) ? proven and robust silicon mems vibrating ring gyro ? low bias instability (24o/hr) over short integration p eriod (<1s) ? low angular random walk (0.28o/ ? hr) ? in-plane, orthogonal and 20o inclined sensing options (crm100, crm200 and CRM120) ? user selectable dynamic ranges; 75o/s, 150o/s, 300o/s and 900o/s (maximum 1,000o/s) ? analogue and digital ( spi ? ) output modes ? user adjustable bandwidth to 160hz ? 3v supply ? low power consumption (4ma) ? high shock and vibration rejection ? hermetically sealed ceramic lcc surface mount pac kage for temperature and humidity resistance ? integral temperature sensor ? low integration cost ? design tools and resources available ? rohs compliant ? aec q100 tested applications ? automotive in-car navigation ? precision gps vehicle and personal navigation aiding ? vehicle yaw, pitch and roll rate sensing ? gesture sensing ? motion tracking ? pointing devices ? precision agriculture ? antenna stabilisation ? industrial and robotics 1 general description pinpoint ? is a single-axis mems angular rate sensor (gyro) capable of measuring angular velocity up to a maximum of 1,000o/s which has two output modes; an analogue voltage signal which is linearly proportional to angular speed, and a digital signal in spi ? protocol. the choice of output mode; analogue or digital, is determined by the user when connecting it to the user?s host pcba; details of the electrical interface between pinpoint ? and the host pcba are given in section 7. pinpoint ? is available in several con gurations; a) crm100 which measures angular velocity about an axis perpendicular to the plane of the host pcba, referred to as ?in-plane? sensing, b) crm200 which measures angular velocity about an axis which is parallel to the plane of the host pcba, referred to as ?orthogonal? sensing and c) CRM120 which measures angular velocity about an axis 20o off the perpendicular for applications where the host pcba is a 20o an inclined angle. this datasheet relates to part number crm200. with a combination of crm100 and crm200 it is possible for the user to measure angular rate of multiple axes (e.g. any combination of pitch, yaw and roll) from a single host pcba. pinpoint ? is supplied as a pcba surface mountable lcc ceramic packaged device. it comprises ve main components; silicon mems ring sensor, pedestal, asic, package base and lid. more details of the construction are given in section 13. there are eight actuators / transducers distributed evenly around the perimeter of the silicon mems ring. located about its primary axes are a single pair of ?primary drive? actuators and a single pair of ?primary pick-off? transducers. located about its secondary axes (at 45 to the primary) are two pairs of ?secondary pick-off? transducers see figure 1.1. the ?primary drive? actuators and ?primary pick-off? transducers act together in a closed-loop system to excite and control the ring primary operating vibration amplitude and frequency. secondary ?pick-off? transducers detect radial movement at the secondary axes, the magnitude of which is proportional to the angular speed of rotation and from which the gyro derives angular rate. more information about the principles of operation are given in section 13. actual size
ppo driver rate o/p amplitude real quad spo adc trim sets interface por vref bit interface control calibration o c2 (0.56nf to 270nf) c3 0.1f bw_cap mode_sel reset vdd vss prog rate_out vref_cap c1 10f 0.1f 2.7 to 3.6v data_in / sel1 data_out / bit_out dclk / sel0 factory / ss c.g.18391 figure 1.2 crm200 overall dimensions 6.30 4.60 6 - 0.5 2 - (0.35) 4 - r0.40 8 - (0.50) 5.50 2.63 16 - 0.80 2.40 5678 910 11121314 1516 4321 6 - 0.5 2 - (0.35) 0.90 p x 5 = 4.50 8 - (0.50) + ve c.g. 18371 all dimensions in millimetres. figure 1.1 crm200 functional block diagram crm200-00-0100-132 rev 5 page 2 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
3 speci cation unless stated otherwise, the following speci cation values assume vdd = 3.0v and an ambient temperature of +25c. ?over temperature? refers to the temperature range -40c to +85c. parameter minimum typical maximum notes measurement range: dynamic range 75/s, 150/s, 300/s, 900/s user selectable absolute limit 1,000/s sensitivity: analogue output mode sensitivity: scale factor (k) (nominal) for 75/s operation, k = 0.012 x vdd/3 v//s for 150/s operation, k = 0.006 x vdd/3 v//s for 300/s operation, k = 0.003 x vdd/3 v//s for 900/s operation, k = 0.001 x vdd/3 v//s ratiometric ratiometric ratiometric ratiometric see section 7.1 scale factor variation at +25c ? 0 . 5 %? ? scale factor variation over temperature -3% 1% +3% ? page 3 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com 2 ordering information part number sense axis description measurement range modes overall dimensions supply voltage /s mm v crm100 single-axis pinpoint ? mems gyroscope. sensing axis perpendicular (in-plane) to the host pcba. user con gured for 75, 150, 300 & 900 analogue or digital (user con gured) 5.7x4.8x1.2h 2.7 ~ 3.6 CRM120 single-axis pinpoint ? mems gyroscope. sensing axis at 20 (inclined) to the host pcba. user con gured for 75, 150, 300 & 900 analogue or digital (user con gured) 5.7x5.0x4.9h 2.7 ~ 3.6 crm200 single-axis pinpoint ? mems gyroscope. sensing axis parallel (orthogonal) to the host pcba. user con gured for 75, 150, 300 & 900 analogue or digital (user con gured) 6.3x2.7x5.5h 2.7 ~ 3.6 400046-0100 (crm100) gyro evaluation board for the crm100 single-axis pinpoint ? mems gyroscope (includes the gyro). see section 8 for more details user con gured for 75, 150, 300 & 900 analogue 12x12x5h 2.7 ~ 3.6 400046-0200 (crm200) gyro evaluation board for the crm200 single-axis pinpoint ? mems gyroscope (includes the gyro). see section 8 for more details user con gured for 75, 150, 300 & 900 analogue 12x12x8.5h 2.7 ~ 3.6 400046-0300 3-axis gyro evaluation board for the pinpoint ? mems gyroscope (includes the gyros). see section 8 for more details user con gured for 75, 150, 300 & 900 analogue or digital (user con gured) 25x25x8.5h 2.7 ~ 3.6 + ve m ade in japan cyym lllddssssr c rm 1 0 0 crm200 cyymlllddssssr made in japan + v e + ve m a d e in jap an c yym llld dssssr c r m 10 0 + ve + ve + ve crm200 cyym lll d d ssssr made in japan + ve + ve 20o wwyy CRM120
speci cation continued parameter minimum typical maximum notes scale factor non-linearity ?0 . 0 6 %0 . 2 % percentage of dynamic range using a best straight line t bias (nominal), +25c ? vdd/2 12mv ? ? bias variation with temperature -3/s ? +3/s ? bias switch on repeatability ?0 . 1 4 / s r m s? ? bias drift with time after switch on ? 0.05/s/min ? after 250 seconds bias instability ? 24/hr (75/s range) 40/hr (900/s range) ? allan variance digital output mode sensitivity: scale factor (k) (nominal) for 75/s operation, k = 96 lsb//s for 150/s operation, k = 48 lsb//s for 300/s operation, k = 24 lsb//s for 900/s operation, k = 8 lsb//s note: digital output is not ratiometric scale factor variation at +25c ? 0 . 5 %? ? scale factor variation over temperature -3% 1% +3% ? scale factor non-linearity ?0 . 1 6 %0 . 2 % percentage of dynamic range using a best straight line t bias (nominal), +25c ? 0000 10 96 10 lsb ? ? bias variation with temperature -3/s ? +3/s ? bias switch on repeatability ?0 . 1 4 / s r m s? ? bias drift with time after switch on ? 0.05/s/min ? after 250 seconds bias instability ? 24/hr (75/s range) 40/hr (900/s range) ? allan variance noise: rate noise density ? 0.018/s/ ? hz 0.025/s/ ? hz ? angular random walk ? 0.28/ ? hr ? allan variance frequency response: bandwidth 5hz ? 160hz user selectable see section 7.5 temperature sensor: digital output only offset ? 0512 10 ? nominal for 0c crm200-00-0100-132 rev 5 page 4 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
speci cation continued parameter minimum typical maximum notes scale factor ? 2.75 lsb/c ? ? +25c typical output ? 600 10 20 10 ?? start up: time to full performance ? 300ms (vdd=2.7v) 250ms (vdd=3.6v) 1s ? physical: m a s s ?0 . 3 g? ? misalignment (cross-axis sensitivity) +50 mrad ? +50 mrad this equates to a cross-axis sensitivity of approximately 5% misalignment over temperature ?0 . 0 3 m r a d / c? ? environmental: temperature (operating, full spec) -40c ? +85c gyro will function at full speci cation temperature (operating, reduced spec) -40c ? +105c gyro will function at reduced performance temperature (storage) -60c ? +125c ? humidity ? ? 85% rh non-condensing shock (operating) ? ? 500g 1ms ? shock (survival) ? ? 10,000g 0.1ms ? vibration recti cation error ?0 . 0 0 1 / s / g 2 rms 0.003/s/g 2 rms 12g rms stimulus, 10hz to 5khz, random vibration induced noise ?0 . 0 6 / s rms /g 2 rms 0.072/s rms /g 2 rms 12g rms stimulus, 10hz to 5khz, random linear acceleration : g sensitivity ? 0.077/s/g 0.17/s/g steady state electrical: supply voltage 2.7v 3.3v (nom) 3.6v ramp rate should be greater than 1v/ms current consumption (inrush - during start-up) ??1 2 m a excluding charging decoupling capacitors current consumption (operating - after start-up) ? 4.0ma 5.0ma ? interface: spi ? message rate 500hz 1khz 10khz ? spi ? clock rate 100khz 1mhz 8mhz ? c b i t o f f s e t ?+ 5 0 / s? 1 0 / s n o m i n a l t o l e r a n c e page 5 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
4 absolute minimum/maximum ratings minimum maximum angular velocity: powered (saturated) ? 150,000/s unpowered ? no limit angular acceleration: powered ? 24,000/s 2 unpowered ? no limit linear acceleration (any axis): powered ? 3,500g unpowered ? 10,000g 0.1ms electrical: vdd -0.3v +4.0v esd protection ? 2kv hbm (except prog pin) 1kv hbm prog pin 200v mm duration of short circuit on any pin (except vdd) ? no limit temperature: operating -40c +105c max storage (survival) ? +125c humidity ? 85% rh non-condensing notes: improper handling, such as dropping onto hard surfaces, can generate every high shock levels in excess of 10,000g. the resultant stresses can cause permanent damage to the sensor. exposure to the absolute maximum ratings for extended periods may affect performance and reliability. crm200-00-0100-132 rev 5 page 6 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
page 7 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. 5 typical performance characteristics graphs showing typical performance characteristics for pinpoint ? are shown below: analogue output mode - vdd = 3v, measurement range = 75/s figure 5.3 analogue scale factor error (12 mv//s nominal) vs temperature figure 5.4 normalized analogue scale factor variation vs temperature figure 5.1 analogue bias vs temperature (12 mv//s nominal) figure 5.2 normalized analogue bias vs temperature precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
figure 5.7 analogue output linearity error vs applied rate at +25c figure 5.8 analogue output linearity error vs applied rate at +85c figure 5.5 typical analogue output linearity error vs applied rate figure 5.6 analogue output linearity error vs applied rate at -40c crm200-00-0100-132 rev 5 page 8 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com analogue output continued
page 9 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. figure 5.11 analogue bias at +25c figure 5.12 analogue bias at +25c figure 5.9 typical rate output with analogue cbit vs temperature figure 5.10 current consumption vs temperature precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com analogue output continued
figure 5.15 normalized analogue scale factor variation over temperature figure 5.16 analogue output maximum linearity error at -40c (best straight line fit) figure 5.13 normalized analogue bias over temperature figure 5.14 analogue scale factor at +25c crm200-00-0100-132 rev 5 page 10 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com analogue output continued
page 11 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. figure 5.19 rate output change with analogue cbit at +25c figure 5.20 current consumption at +25c figure 5.17 analogue output maximum linearity error at +25c (best straight line fit) figure 5.18 analogue output maximum linearity error at +85c (best straight line fit) precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com analogue output continued
figure 5.21 digital bias vs temperature figure 5.22 normalized digital bias vs temperature figure 5.23 digital scale factor error (96 lsb//s nominal) vs temperature figure 5.24 normalized digital scale factor variation vs temperature digital output mode crm200-00-0100-132 rev 5 page 12 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
digital output continued page 13 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. figure 5.25 typical digital output linearity error vs applied rate figure 5.26 digital output linearity error vs applied rate at -40c figure 5.27 digital output linearity error vs applied rate at +25c figure 5.28 digital output linearity error vs applied rate at +85c precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
figure 5.29 typical rate output with digital cbit vs temperature figure 5.30 digital temperature vs temperature figure 5.31 digital bias at +25c figure 5.32 digital bias at +25c crm200-00-0100-132 rev 5 page 14 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com digital output continued
page 15 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. figure 5.33 normalized digital bias over temperature figure 5.34 digital scale factor at +25c figure 5.35 normalized digital scale factor variation over temperature figure 5.36 digital output maximum linearity error at -40c (best straight line fit) precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com digital output continued
figure 5.37 digital output maximum linearity error at +25c (best straight line fit) figure 5.38 digital output maximum linearity error at +85c (best straight line fit) figure 5.39 rate output change with digital cbit at +25c figure 5.40 digital temperature at +25c crm200-00-0100-132 rev 5 page 16 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com digital output continued
page 17 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. startup figure 5.41 startup time vs temperature (vdd = 2.7v) figure 5.42 startup time vs temperature (vdd = 3.6v) figure 5.43 normalized bias drift after switch-on figure 5.44 switch-on repeatability of normalized mean bias precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
figure 5.45 allan variance plot (75/s setting) crm200-00-0100-132 rev 5 page 18 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. allan variance 6 glossary of terms adc analogue to digital converter arw angular random walk asic application speci c integrated circuit bit built-in test bw bandwidth cbit commanded built-in test dac digital to analogue converter drie deep reactive ion etch dsbsc double side-band suppressed carrier signal emc electro-magnetic compatibility esd electro-static damage hbm human body model ipc institute of printed circuits lcc leadless chip carrier lsb least signi cant bit mems micro-electro mechanical systems nec not electrically connected pcba printed circuit board assembly ppo primary pick-off sf scale factor smt surface mount technology spi ? serial peripheral interface a registered trademark of motorola, inc. spo secondary pick-off precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
1 vss bw_cap nec nec nec nec caution: * indicates dual function pin depending on selection of analogue or digital output modes. c.g. 18383 reset prog vdd vref_cap * sel0 / dclk * factory / ss * bit_out / data_out rate_out * sel1 / data_in mode_sel 2 3 4 5 6 7 8 16 15 14 13 12 11 10 9 note: pin 12 (vref_cap) should not be connected to c3 by means of a via hole. this is to prevent current leakage due to moisture entrapment. note: pin 1, 8, 9, & 16 are for mechanical fixing purposes and should be soldered to an unconnected pad. page 19 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. 7 interface physical and electrical inter-connect information for analogue and digital output modes, and digital spi ? message information for the digital output mode. physical interface, pad layout and pinouts: figure 7.2 recommended pad layout (crm200) 2.30 4 - 1.50 12 - 1.50 2 - 0.90 p x 5 = 4.50 4 - 0.50 c.g.18372 12 - 0.65 c l c l 0.73 silk-screen pin 1 marker figure 7.1 pinout (crm200) (top view) vss mode_sel vdd vdd (2.7 to 3.6v) prog sel0 rate_out bit_out cbit reset sel1 900deg/s setting 300deg/s setting 150deg/s setting 75deg/s setting 6 2 4 5 15 nec nec nec nec bw_cap vref_cap 10 host system crm200 gyro 3 1 9 16 7 c2 47nf c4 0.1f c1 10f c3 0.1f 12 8 11 13 14 c.g. 18369 figure 7.3 peripheral circuit - analogue output (crm200) vss mode_sel vdd vdd (2.7 to 3.6v) vdd (2.7 to 3.6v) prog dclk data_out miso mosi slave select dio spi clock_out nec ss reset data_in 6 2 4 5 15 nec nec nec nec bw_cap vref_cap 10 host system crm200 gyro 3 1 9 16 7 c4 0.1f c1 10f c3 0.1f c2 560pf 12 8 11 13 14 c.g. 18370 figure 7.4 peripheral circuit - digital output (crm200) all dimensions in millimetres. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
crm200-00-0100-132 rev 5 page 20 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com table 7.1 pin functions 7.2 input/output pin de t nitions the pin names, types, direction, levels and functions for the gyro are identi ed in table 7.1 below note 1: digital i/o absolute maximum rating of -0.5v to vdd+0.5v note 2: digital input cmos levels, low of 0.3xvdd and high of 0.7xvdd note 3: digital output cmos levels, low of 0.4v max and high of 0.8xvdd min note 4: analogue i/o absolute maximum rating of -0.3v to vdd+0.3v pin name pin number pin type pin direction pin levels pin function analogue output mode digital output mode analogue output mode digital output mode cbit ss 15 digital input cmos with pull-up of 110 k ? in analogue mode this pin is used to initiate a commanded bit function. logic ?0? = cbit enabled logic ?1? = cbit disabled in digital mode this pin is the spi ? select line. sel0 dclk 2 digital input cmos with pull-up of 110 k ? in analogue mode this pin provides one of the two rate range selection inputs. in digital mode this pin is the spi ? clock output line from the host system. bit_out data_out 3 digital output cmos (secure/sink capability = 2ma) in analogue mode this pin outputs the result of internal bit, where a logical ?lo? state indicates a gyro failure. in digital mode this pin is the spi ? data output line from the pinpoint ? gyro. sel1 data_in 4 digital input cmos with pull-up of 110 k ? in analogue mode this provides one of the two rate range selection inputs. in digital mode this is the spi ? data input line from the host system. rate_out nec 5 analogue output 2 ? output impedance analogue rate output from the pinpoint ? gyro. not electrically connected. mode_sel 6 digital input cmos with pull-down of 110 k ? used to select between analogue and digital modes of operation. if tied or pulled to vss, analogue mode is selected. if tied or pulled to vdd, digital mode is selected. bw_cap 7 analogue output 50k ? impedance used to select the gyrobandwidth. minimum value of 560pf. reset 10 digital input cmos with pull-up of 110 k ? used to reset the gyroscope. this will reload the internal calibration data and will latch the sel0 and sel1 states to select a rate range. used to reset the gyroscope. this will reload the internal calibration data and the rate range will be initially set by the internal calibration constants. vss 11 supply n/a 0v (absolute max -0.3v) return connection for applied power (0v) vref_cap 12 analogue input 50k ? impedance used to decouple the internal voltage reference for the gyroscope via an external capacitor. a 100nf ceramic capacitor with x7r dielectric is suf cient decoupling. prog 13 analogue input 100k ? impedance used in factory to program calibration constants. data cannot be altered. pin must be connected to vdd for correct operation. vdd 14 supply n/a 2.7v to 3.6v (absolute max 4.0v) positive power supply to the gyroscope. range from +2.7v to +3.6v. supply should be decoupled from vss with a 100nf ceramic capacitor (c4) with x7r dielectric. a bulk storage capacitor of 10 f should be placed near to the gyroscope. nec 1, 8, 9 & 16 ?? ? not electrically connected. these pins provide additional mechanical xing to the host system and should be soldered to an unconnected pad.
7.3 supply voltage the required supply voltage is 2.7 to 3.6v, and the ramp rate during power up should be > 1v/ms. 7.4 measurement range set-up dynamic range for the analogue output mode can be set at 75/s, 150/s, 300/s or 900/s [saturates at approximately 1,000deg/s]. the dynamic range of the analogue output from the gyroscope is user selectable by means of two range select pins. this is described in figure 7.3 (peripheral circuit analogue output). note that the status of these range select pins is read at power-up and no attempt should be made to alter the rate range dynamically during operation. note ; the analogue output remains available on pin 5 when the gyro is connected in digital output mode, however it is recommended that this is not used by the host system and instead is non-electrically connected (nec). 7.5 bandwidth (analogue output) the value of capacitor c2 (47nf) in the peripheral circuit shown in figure 7.3 sets the bandwidth at 60hz. to set other bandwidths select the c2 capacitor values according to the table 7.2 below: capacitive value of c2 bandwidth (reference) 33nf typ 95hz 47nf typ 70hz 68nf typ 50hz 100nf typ 33hz 120nf typ 27hz 270nf typ 12hz table 7.2 bandwidth capacitor values the minimum value of c2 is 560pf. c2 should have a ceramic dielectric. for angular rate inputs in the frequency range dc to 120hz, the analogue response of pinpoint ? can be approximated by the following expression: note: c bw = c2 where: vdd is the supply voltage, d /dt is the rate of rotation about the sense axis, k is the scale factor coef cient dependent on rate range and supply voltage. note that the sensor is ratiometric with respect to the supply voltage when operating in analogue output mode: for 75/s operation, k = 0.012 x vdd /3 for 150/s operation, k = 0.006 x vdd /3 for 300/s operation, k = 0.003 x vdd /3 for 900/s operation, k = 0.001 x vdd /3 f is the frequency of the rate of rotation (if not steady state), r is the roll-off resistor inside the asic (nominally 48k ? ), c bw is the bandwidth capacitor (c2). note that wide band frequency response approximates to a third order. a more thorough expression of bandwidth is. where r is nominally 48k ? but has a process tolerance of 14%. 7.6 bandwidth (digital output) the bandwidth on the digital output follows that of the analogue mode, being set by c2 as described in section 7.5. however, to optimise the oversampling performance of the adc, the user may make this value 560pf and implement digital lter algorithms in the host system. 7.7 non-electrical connections (nec) p ins 1, 8, 9 and 16 are not to be connected electrically, they are for mechanical purposes only. also pin 5 is not to be connected electrically when the gyro is in digital output mode. 7.8 built in test (bit) & commanded built in test (cbit) pinpoint ? contains a sophisticated health monitoring system that continuously checks a number of key parameters within the gyro control asic. for ease of use, each of the parameters are veri ed against internal limits and the results gated together, such that the user gets a single bit line con rming the correct operation of the gyro. page 21 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
the functions that are monitored are as follows, with any failure resulting in bit_out being set to false (logic ?0?): 1. the calibration data memory area is checked for parity at power-up. in the event that any single data bit has failed, bit_out will be set to false. 2. the trim and calibration coef cients in the data memory are fed into the control electronics by means of individual dac conversion stages. these are also veri ed at power up, so that an incorrect conversion of trim data into performance setting will result in bit_out being set to false. 3. for correct operation, the mems silicon ring is set into oscillation at its resonant frequency to a preset amplitude. the primary drive control loops set the amplitude of motion of the ring using an automatic gain control (agc) circuit. the bit system monitors the required drive from the agc: if the required drive is too high, (indicating either an electronic drive failure, a transducer failure or a structural failure of the ring itself), the bit_out signal will be set false. similarly, if the agc level is too low, (indicating a failure in the control loop electronics or the drive transducer), bit_out will be set to false. one consequence of this function is that, during startup, the bit_out will be set false until the loops have closed and stabilised to the correct values. 4. the angular rate output is derived from the demodulated secondary pick-off signal. the amplitude of this signal is checked against a maximum: in the event that the gyro is rotated at an angular rate beyond the level at which the control loops can operate, (i.e. >>1,000/s), then the saturation of the demodulator will set bit_out to false. note that bit_out will not be set to false when the analogue rate output stage saturates: for example, if the gyro is con gured for 75/s range, and rotated at 300/s, the internal control electronics will still operate correctly and bit_out will not be set false. 5. key to pinpoint ? ?s performance is the balance of the mems ring and matching of the secondary transducers. these aspects are internally monitored by measuring the demodulated quadrature signal from the rate demodulation stage. whilst this signal contains no direct angular rate information, its magnitude is a very good indication regarding the health of the transducers, the ring and the demodulation electronics. any excess quadrature signal will result in bit_out being set to false. in addition, the spi ? message has a checksum calculation performed. any checksum failure will be reported as a separate ag in the spi ? message - see section 7.12.5. a ?commanded built in test? (cbit) is also available which allows the user to request a test function to be applied, causing an offset to appear on the rate signal equivalent to 50/s of rate. this test function can be initiated by the use of the cbit input pin in analogue mode or via the spi ? interface in digital mode. when cbit is enabled the bit_out signal is set to ?false? to indicate the device is in the test mode. the function checks a large proportion of the gyro functionality including the primary loop, secondary pick-off ampli ers, secondary rate channel ltering, rate range selection, rate output buffer, adc references, adc conversion and digital output ltering. 7.9 temperature sensor the asic within pinpoint ? contains a temperature sensor cell that is accessible only via the digital interface. users may interrogate this sensor as described in section 7.12.5 such that the thermal characteristics of any individual pinpoint ? gyro can be compensated at system level. dependent on the level of compensation required, algorithms that use linear ts, quadratic ts or piece-wise-linear lookup tables will further enhance the system level performance. it is preferable in such applications to use the internal temperature sensor rather than an external temperature sensor so as to avoid the effects of system level thermal gradients. for example, a second order polynomial correction for both offset and sensitivity could be described as. the sensitivity of the temperature sensor is nominally 2.75 lsb / c, with +25c being represented by 600 10 20 10 lsb. the sensor is an integral part of the asic. the power consumption of pinpoint ? is so low that the thermal asymmetry between the control electronics and the ring itself is extremely low. the temperature signal is not available as an analogue signal. ()() 2 02 2 1 tetd tctba c t +++++= ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
7.10 power supply noise rejection by design, pinpoint ? is a ratiometric sensor; the analogue output characteristics are therefore controlled by both the applied angular rate and the supply voltage. consequently the user should take any necessary precautions to manage the supplies from a noise and ripple viewpoint. any noise or ripple within the selected pass band will appear on the output at half the magnitude. good system decoupling is recommended for best performance. if ratiometric response is not desired, then pinpoint ? should be operated either from a well regulated supply or alternately, the digital output should be used. by virtue of the internal adc sharing a common reference voltage, the digital output is not ratiometric. in addition, pinpoint ? determines the angular rate from a double-sideband suppressed carrier signal superimposed on the primary resonance of the vibrating ring. the carrier is at a frequency of nominally 22khz. in common with all demodulation systems, power supply rejection at the demodulation frequency and its odd harmonics is limited, and care should be taken to minimise power supply ripple at frequencies around 22khz, 66khz and 110khz. if the system is to be supplied from a switching regulator, it is recommended that the switching frequency should be not less than 150khz. 7.11 prog pin 13 ? special note the factory calibration is effected by one time programmable setting via pin 13. users should ensure that this is connected to vdd. voltages in excess of vdd applied to this pin may permanently and irreversibly damage the calibration area of the device. 7.12 digital mode to activate the digital mode of operation for the pinpoint ? gyro, it is necessary to connect the mode_sel (pin 6 on crm200) input to the positive supply rail (vdd). this not only activates the internal adc, but also switches a number of the i/o pins to secondary functions to create the interface. the recommended con guration is shown in figure 7.4 peripheral circuit (digital mode). 7.12.1 digital spi ? interface the digital interface is con gured as spi ? operating as a ?slave? in a ?mode 0? con guration. [note: for interfacing to most microcontrollers, this is often set up as cpol=0 and cpha=0]. figure 7.5 shows the principle of spi ? data transfer. data is transferred to the host system and pinpoint ? in complete messages which are 6 bytes or 48 bits in length. figure 7.5 spi ? data transfer principle as shown in figure 7.5, the host system acts as a spi master and provides the clock to the spi ? shift registers. in most instances the host system cannot take all 48 bits in one tranche as the receive registers are 8 or 16-bit wide. because the host system is running as a spi ? master, it is relatively simple to take the data one byte or word at a time as a single bit is shifted on each clock cycle. for example, if the host system needs to read the data on a byte-by-byte basis, the steps required are: 1. set ss to a logic 0 to initiate the transfer. 2. send 8 spi ? clock cycles to transfer a byte of data between pinpoint ? and the host system. 3. the host system can store the received byte. 4. repeat 2 and 3 until all 6 bytes have been received. 5. set ss to a logic 1 to complete the transfer. a full timing diagram is shown in figure 7.6 with the parameters detailed in table 7. 3 . pinpoint host system dclk spi clock out miso clock source mosi slave select data_out 47 msb lsb 46 2 1 0 data_in ss n msb lsb n-1 2 1 0 c.g. 18377 page 23 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
7.12 . 2 spi ? bus limitation (early samples) early samples of pinpoint ? are identi ed by the 14 character lot identi er beginning with ?2?. these parts had a known tri-state limitation. the gyro implementation did not appear as a high impedance load when deselected (ss = 1) and as a result the data_out pin (pin 3 on crm200) would still be active. therefore it is recommended that pinpoint ? gyros having the designation 1xxxx are the only device connected to the host system on a dedicated gyro spi ? bus. this has been corrected by a silicon change which is identi ed by the lot identi er beginning with ?3?. parameter min typical max t start 25 s- - t stop 5 s- - t hold 15 s- - t f - 20ns - t r - 20ns - t clk 10s1 s 0.125s table 7.3 spi ? timing parameters figure 7.6 spi ? timing bit 5 bit 0 (lsb ) bit 1 bit 2 bit 3 bit 4 bit 6 bit 7 (msb) host byte 1 command byte bit 5 bit 0 (lsb) bit 1 bit 2 bit 3 bit 4 bit 6 bit 7 (m sb ) host byte 6 checksum dclk data_in bit 5 bit 0 (lsb ) bit 1 bit 2 bit 3 bit 4 bit 6 bit 7 (msb) pinpoint byte 1 status byte bit 5 bit 0 (lsb) bit 1 bit 2 bit 3 bit 4 bit 6 bit 7 (m sb ) pinpoint byte 6 checksum data_out t start idle state t clk bit 0 (lsb) bit 7 (msb) bit 6 bit 1 ss t r t f t hold t stop g.g. 18378 7.12.3 message structure as previously described, 6 bytes of data are transferred to and from the pinpoint ? gyro for each message. individually, the messages are made up of bytes as follows: data from the host system is known as a command message and is con gured as shown in figure 7.7. figure 7.7 command message structure data from the pinpoint ? gyro is known as a status message and is con gured as shown in figure 7.8. figure 7.8 status message structure reserved reserved reserved reserved checksum command byte 1 byte 2 byte 3 byte 4 byte 5 byte 6 c.g. 18379 data 0 data 1 data 2 data 3 checksum status byte 1 byte 2 byte 3 byte 4 byte 5 byte 6 c.g. 18380 crm200-00-0100-132 rev 5 page 24 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
7.12.4 command message command byte (byte 1) the 8 bit command byte sent from the host system has the format speci ed in figure 7.9. figure 7.9 command byte format bit 7 ?0? = normal user mode ?1? = factory use only bit 7 must be set to ?0? for the host system to receive useful data from the pinpoint ? gyro. the data returned contains both rate and temperature information. bit 6 ?0? = cbit disabled ?1? = cbit enabled bit 6 is used to enable the ?commanded built in test? function (bit) which produces a 50/s nominal offset on the rate output signal. bit 5 ?0? = internal rate range ?1? = spi ? rate range bit 5 identi es the source for setting the rate range. if the bit is set to a ?0?, then the source becomes the internal factory default (75/s). if the bit is set to a ?1?, then bits 4 and 3 in the message are used to make the required rate range selection. bits 4 & 3 ?00? = 900o/s rate range ?01? = 300o/s rate range ?10? = 150o/s rate range ?11? = 75o/s rate range bits 4 and 3 are used in combination to select the rate range via the spi ? bus. c.g. 18381 0 rr1 rrs x rr0 x x x bit 0 bit 7 bit 6 bit 5 bit 4 bit 3 bit 2 bit 1 00 = 900/s rate range 01 = 300/s rate range 10 = 150/s rate range 11 = 75/s rate range 0 = internal rate range source 1 = spi rate range source 0 = cbit disabled 1 = cbit enabled 0 = normal user mode 1 = factory use only factory use only bits 2, 1 & 0 factory use only reserved bytes (bytes 2 to 5) reserved for factory use only. the content of each byte is ignored by the pinpoint ? gyro. checksum byte (byte 6 ) the checksum byte is used by the pinpoint ? gyro to ensure that the message is valid. this is a computed binary number which is the least signi cant 8 bits of the logical inverse of the sum of bytes 1 to 5 inclusive. as an example, here is a command to request data from a 150/s rate range gyro: command byte 0x30 reserved 0x00 reserved 0x00 reserved 0x00 reserved 0x00 the sum of these bytes is 0x30 and its logical inverse is 0xcf. thus the checksum byte is: checksum 0xcf the complete message transmitted, in hexadecimal format, would therefore be: 3000000000cf 7.12.5 status message status byte (byte 1) the 8 bit status byte sent from the pinpoint ? gyro has the format speci ed in figure 7.10. figure 7.10 status byte format c.g. 18382 bit prm mt0 mt1 cbit rr0 rr1 0 bit 0 bit 7 bit 6 bit 5 bit 4 bit 3 bit 2 bit 1 00 = 900/s rate range 01 = 300/s rate range 10 = 150/s rate range 11 = 75/s rate range 0 = previous message valid 1 = previous message invalid 0 = cbit disabled 1 = cbit enabled 00 = rate and temperature data all other factory use only 0 = gyro ok 1 = gyro fail always 0 page 25 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
rate range ( o/s) scale factor (bits/( o/s)) 75 96 150 48 300 24 900 8 table 7.4 digital rate scale factors for example; a rate word value of 12c0 (hex) would be equal to +50/s on the 75/s rate range, or a value of f4c0 (hex) would be equal to -120/s on the 300/s rate range. data byte - temp (byte 4 and 5) data bytes 4 and 5 contain the internal temperature data information from the pinpoint ? gyro. byte 4 is the ms byte and byte 5 is the ls byte of the complete word. the data is represented in unsigned binary format. a temperature code of 0200 (hex), equivalent to 512 in decimal, represents 0c. the scale factor of the data word is xed at 2.75 bits/c. for example; -40c would be represented by 0192 (hex) or 402 (dec) and +85c as 02e9 (hex) or 745 (dec). checksum byte (byte 6) the checksum byte is used by the pinpoint ? gyro to ensure that the message is valid. 7.12.6 digital bandwidth the bandwidth for the pinpoint ? gyro in digital output mode is determined by the value of capacitor c2. however, to optimise the oversampling performance of the adc, the user may make this value 560pf and implement digital lter algorithms in the host system. 7.12 .7 spi ? sampling rate and clock frequency it is recommended that the host system takes data from the gyroscope at a rate of 1,000 messages per second (1khz). message rates up to 10khz may be accommodated, but rates less than 500hz may lead to unwanted aliasing in the frequency domain. the recommended spi ? clock frequency is 1mhz (100khz minimum to 8mhz maximum). bit 7 ?1? = gyro fail ?0? = gyro ok bit 7 identi es the working state of the pinpoint ? gyro. if this bit is set to a ?1?, then the pinpoint ? gyro has failed its internal checks and the data within the message contained in bytes 2 to 5 should be considered invalid, and if set to a ?0? then the pinpoint ? gyro has successfully passed its internal checks and the data within the message contained in bytes 2 to 5 can be considered valid. bit 7 is also set to a ?1? if cbit function is enabled. bits 6 & 5 ?00? = rate/temp data bits 6 and 5 return an identi er to the message type, and therefore identify the data types within bytes 2 to 5. message type ?00? is the only one available to the host system as all others are for factory use only. bit 4 ?1? = previous message invalid ?0? = previous message valid bit 4 provides feedback with regard to the previous command message sent by the host system. if the bit is set to a ?1? then the last message received was corrupt (i.e. the checksum was invalid) and the message was ignored. the output message type will be that selected in the last valid command message. bit 3 ?1? = cbit enabled ?0? = cbit disabled bit 3 indicates if the commanded built in test (cbit) function is enabled or disabled. bit 2 ?00? = normal bits 2 should always return ?00?. bits 1 & 0 ?00? = 900o/s rate range ?01? = 300o/s rate range ?10? = 150o/s rate range ?11? = 75o/s rate range data byte - rate (byte 2 and 3) data bytes 2 and 3 contain the rate data information from the pinpoint ? gyro. byte 2 is the ms byte and byte 3 is the ls byte of the complete word. the data is represented in 2?s complement format. the scale factor of the data word is dependent upon the rate range selected in the command message. table 7.4 shows the relationship. crm200-00-0100-132 rev 5 page 26 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
8 design tools and resources available item description of resource part number order/download pinpoint ? brochure: a one page sales brochure describing the key features of the pinpoint ? gyro. crm100-00-0100-131 download (www.pinpoint-gyro.com) pinpoint ? crm100 datasheet: full technical information on all pinpoint ? gyro part number options. speci cation and other essential information for assembling and interfacing to pinpoint ? gyros, and getting the most out of them. crm100-00-0100-132 download (www.pinpoint-gyro.com) pinpoint ? CRM120 datasheet: full technical information on all pinpoint ? gyro part number options. speci cation and other essential information for assembling and interfacing to pinpoint ? gyros, and getting the most out of them. CRM120-00-0100-132 download (www.pinpoint-gyro.com) pinpoint ? crm200 datasheet: full technical information on all pinpoint ? gyro part number options. speci cation and other essential information for assembling and interfacing to pinpoint ? gyros, and getting the most out of them. crm200-00-0100-132 download (www.pinpoint-gyro.com) pinpoint ? presentation: a useful presentation describing the features, construction, principles of operation and applications for the pinpoint ? gyro. ? download (www.pinpoint-gyro.com) single-axis pinpoint ? gyro evaluation boards (crm100 & crm200 options): single pinpoint ? gyro tted to a small pcba for easy customer evaluation and test purposes. analogue output only. smt solder pads provided for wire links to the customer host system. measurement range and bandwidth are customer-selectable by on-board cut-able links (default 75o/s) and by soldering the appropriate 0805 footprint smt capacitor value (capacitors not supplied). designed to be xed to the host using epoxy or double-sided tape. 400046-0100 (crm100) order 400046-0200 (crm200) order three-axis pinpoint ? gyro evaluation board (crm100 & 2x crm200): three pinpoint ? gyros tted to a small pcba for easy customer evaluation and test purposes. analogue and digital outputs. smt solder pads provided for wire links to the customer host system. digital interface has three separate spi ? lines. measurement range and bandwidth are customer- selectable by on-board cut-able links (default 75o/s) and by soldering the appropriate 0805 footprint smt capacitor value (capacitors not supplied). designed to be xed to the host by either using epoxy, double-sided tape or using the four screws supplied. 400046-0300 order solid model cad les for pinpoint ? gyros: available in .stp and .igs le format crm100-00-0100-408 download (www.pinpoint-gyro.com) CRM120-00-0100-408 crm200-00-0100-408 library parts: useful library component les of pinpoint ? gyros: dxdesigner schematic symbols. pads decal (footprint) pads part type file. ? download (www.pinpoint-gyro.com) page 27 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com w wyy CRM120
9 cleaning due to the natural resonant frequency and ampli cation factor (?q?) of the sensor, ultrasonic cleaning should not be used to clean the pinpoint ? gyro. 10 mounting and soldering information crm200 can be automatically ?picked and placed? onto the host pcba using readily available surface mounters tted with conventional rubber nozzles. trials have been conducted which prove that solder paste is suf cient to hold crm200 parts in place prior to soldering. care must be taken to ensure correct alignment of the gyro with respect to the host pcba to avoid excessive cross-axis sensitivity. examples of surface mounters, as used by other pinpoint ? crm200 customers, are: 1. example supplier; juki surface mount technology system. surface mounter model number ke-2060rl, using juki nozzle size; outer diameter 3.5mm, inner diameter 1.7mm (nozzle number 505). design tools and resources available continued item description of resource part number order/download reference circuit: a useful reference circuit design gerber les for the pinpoint ? gyro for use in host systems with either analogue or digital output modes. ? download (www.pinpoint-gyro.com) interface: off-the-peg sudo code and a simple owchart with message handling instructions for use as a customer aid to developing their own interface directly to a pinpoint ? gyro via the spi ? . ? download (www.pinpoint-gyro.com) questions and answers: some useful questions asked by customers and how we?ve answered them. this is an informal (uncontrolled) document intended purely as additional information. ? download (www.pinpoint-gyro.com) rohs compliance statement for pinpoint ? : pinpoint ? is fully compliant with rohs. for details of the materials used in the manufacture please refer to the mds report. ? download (www.pinpoint-gyro.com) mds reports for pinpoint ? : material declaration required for automotive applications. ? download (www.pinpoint-gyro.com) 2. example supplier; yamaha. surface mount machine model number yv100x, using yamaha nozzle size; outer diameter 2.0mm, inner diameter 1.36mm. figure 10.1 recommended re ow solder pro le 217c 260c time (sec) temp (c) 255c max 40sec max 120sec 200c 150c max 180sec c.g. 18384 crm200-00-0100-132 rev 5 page 28 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
11 part number markings figure 11.1 part marking code range con guration c 0 - 9 year number yy 00 - 99 month number m 1 - 9, x, y, z batch lot number lll 001 -999 lot split dd 00 - 99 serial number ssss 0001 - 9999 measurement times r 0 - 9 table 11.1 production number code 12 packaging information layer type quantity crm200 tape and reel max. 1000 pcs/ 1 reel inner bag aluminium damp-proof bag 1 reel/bag inner box cardboard box inner bag x 1/inner box outer box cardboard box inner box/outer box table 12.1 packaging information item dimension quantity material reel dr2 23316c 1 reel ps emboss tape te1612- 091009-2 1 roll ps cover tape als-ata 13.5mm x 480m 1 roll pet, pe, ps label for reel 40mm x 80mm 1 label/reel paper desiccant fa 10g 1 inner bag ? inner bag 0.101mm x 450mm x 530mm 1 reel/inner bag mb4800 tray 451mm x 429mm x 55mm 2 tray/outer box ? pad 451mm x 429mm x 20mm 3 pad/outer box ? inner box 413mm x 391mm x 52mm 2 inner box/ outer box cardboard outer box 462mm x 440mm x 208mm 1 box cardboard label for outer box 102mm x 127mm 1 label/outer box paper table 12.2 packaging speci cation reel information crm200 cyymlllddssssr made in japan indicates corner location of pin 1 silicon sensing company logo part number country of origin of final assembly and test production number: cyymlllddssssr c.g. 18407 110 10 w11.0 b w21.0 3 30 30 0.2 0.4 0.6 0.8 55 89 152 20.5 22 270 801 3302 30.5 50.5 50.5 90.5 70.5 172 210.8 130.2 frame for lable reel width reel width mm detail size of reel centre eiaj.rrm.12.d r1 w1 w2 9.5 8 13.5 13.5 12 17.5 17.5 16 21.5 25.5 24 29.5 33.5 32 37.5 45.5 44 49.5 b 3 b 30.5 c.g. 18385 page 29 crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
emboss tape carrier information tape information label for reel information inner bag packing information inner box packing information crm200 no. s3011002001 part number number c.g. 18410 c.g. 18392 desiccant inner bag reel c.g. 18389 inner bag inner box crm200-00-0100-132 rev 5 page 30 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com c.g.18408 160.3 8.65 0.3 7.50.1 1.750.1 (tolerance between each hole is 0.2) b b c c 20.1 20.3 6.60.1 0.40.05 (tolerance between each hole is 0.2) 80.1 40.1 50.3 2.950.1 20.3 5.80.1 1.3 0.1 hole 1.5 +0.1 0 a a b b view c c view a a view 400mm ~ 700mm empty 400mm empty 2000mm cover tape c.g. 18409 reel label position sensor packing drawing direction
outer box packing information 13 internal construction and theory of operation construction pinpoint ? is available in two basic con gurations, one which will measure angular velocity about an axis perpendicular to the plane of the host pcba (?in-plane? sensing - crm100) and one which measures angular velocity about an axis which is parallel to the plane of the host pcba (?orthogonal? sensing - crm200). pinpoint ? (crm100 and crm200) is supplied as a pcba surface mountable lcc ceramic packaged device. it comprises ve main components; silicon mems ring sensor, silicon pedestal, asic and the package base and lid. the mems ring sensor, asic and pedestal are housed in a hermetically sealed package cavity with a nitrogen back- lled partial vacuum, this has particular advantages over sensors supplied in plastic packages which have moisture sensitivity level limitations. a schematic drawing of crm100 showing the main components is given in figure 13.1 below. the principles of construction for crm200 are the same as crm100. figure 13.1 crm100 main components figure 13.2 crm100 (lid removed) silicon mems ring sensor the 3mm diameter by 65 m thick silicon mems ring is fabricated by silicon sensing using a drie (deep reactive ion etch) bulk silicon process on a 5 inch wafer. the annular ring is supported in free-space by eight pairs of ?dog-leg? shaped symmetrical spokes which radiate from a central 1mm diameter solid hub. the bulk silicon etch process and unique patented ring design enable close tolerance geometrical properties for precise balance and thermal stability and, unlike other mems gyros, there are no small gaps to create problems of interference and stiction. c.g. 18390 2 1 maximum of two reels per outer box. if 1 reel is contained in outer box, label is pasted in position 1. if 2 reels are contained in outer box, labels are pasted in positions 1 and 2. each label shows packaged reel information. box craft tape pad tr ay inner box pad tr ay inner box pad made in japan cyymlllddssssr crm100 lid bond wires seal ring interconnection external solder pads internal bond wire pads vacuum cavity mems ring pedestal asic package base c.g. 18397 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com page 31 crm200-00-0100-132 rev 5
in the ceramic layers connect the lid to vss, thus the sensitive elements are inside a faraday shield for excellent emc. internal and external pads are electroplated gold on electroplated nickel. the package base incorporates a seal ring on the upper layer onto which a kovar ? metal lid is seam welded using a rolling resistance electrode, thus creating a totally hermetic seal. unlike other mems gyro packages available on the market, pinpoint ? has a specially developed seam weld process which eliminates the potential for internal weld spatter. inferior designs can cause dislodged weld spatter which affects gyro reliability due to interference with the vibratory mems element, especially where the mems structure has small gaps, unlike pinpoint ? with its large gaps as described above. theory of operation pinpoint ? is a solid-state device and thus has no moving parts other than the de ection of the ring itself. it detects the magnitude and direction of angular velocity by using the ?coriolis force? effect. as the gyro is rotated coriolis forces acting on the silicon ring cause radial movement at the ring perimeter. there are eight actuators/transducers distributed evenly around the perimeter of the silicon mems ring. located about its primary axes (0 and 90) are a single pair of ?primary drive? actuators and a single pair of ?primary pick-off? transducers. located about its secondary axes (45 and 135) are two pairs of ?secondary pick-off? transducers. the ?primary drive? actuators and ?primary pick-off? transducers act together in a closed-loop system to excite and control the ring primary operating vibration amplitude and frequency (22khz). secondary ?pick-off? transducers detect radial movement at the secondary axes, the magnitude of which is proportional to the angular speed of rotation and from which the gyro derives angular rate. the transducers produce a double sideband, suppressed carrier signal, which is demodulated back to a baseband, the width of which is controlled by the user by one simple external capacitor. this gives the user complete exibility over in system performance, and makes the transduction completely independent of dc or low frequency parametric conditions of the electronics. these features contribute signi cantly to pinpoint ? ?s bias and scale factor stability over temperature, and vibration and shock immunity. another advantage of the design is its inherent immunity to acceleration induced rate error, or ?g-sensitivity?. strain lm actuators/transducers are attached to the upper surface of the silicon ring perimeter and are electrically connected to bond pads on the ring hub via tracks on the spokes. these actuate or ?drive? the ring into its cos2 ? mode of vibration at a frequency of 22khz or detect radial motion of the ring perimeter either caused by the primary drive actuator or by the coriolis force effect when the gyro is rotating about its sensing axis. there is a single pair of primary drive actuators and a single pair of primary pick-off transducers, and two pairs of secondary pick-off transducers. the combination of transducer technology and eight secondary pick-off transducers improves pinpoint ? ?s signal-to-noise ratio, the bene t of which is a very low-noise device with excellent angular random walk properties which are key to inertial navigation type applications, as well as camera/antenna pointing stability. pedestal the hub of the mems ring is supported above the asic on a 1mm diameter cylindrical silicon pedestal, which is bonded to the ring and asic using an epoxy resin. asic the asic is a 3mm x 3mm device fabricated using 0.35 m cmos process. asic and mems are physically separate and are connected electrically by using gold bond wires and thus the asic has no mems-to-asic internal tracking, meaning there is reduced noise pi ck-up and excellent emc performance. gold bond wires also connect the asic to the internal bond pads on the package base. package base and lid the lcc ceramic package base is a multi-layer aluminium oxide construction with internal bond wire pads connected through the package base via integral multi-level tungsten interconnects to a series of external solder pads. similar integral interconnects crm200-00-0100-132 rev 5 page 32 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
referring to figures 13.3(a) to 13.3(d) figure 13.3(a) shows the structure of the silicon mems ring. figure 13.3(b) shows the ring diagrammatically, the spokes, actuators and transducers removed for clarity, indicating the primary drive actuators (single pair), primary pick-off transducers (single pair) and secondary pick-off transducers (two pairs). in figure 13.3(b) the annular ring is circular and is representative of the gyro when unpowered. when powered-up the ring is excited along its primary axes using the primary drive actuators and primary pick-off transducers acting in a closed-loop control system within the asic. the circular ring is deformed into a ?cos2 ? mode which is elliptical in form and has a natural frequency of 22khz. this is depicted in figure 13.3(c). in figure 13.3(c) the gyro is powered-up but still not rotating. at the four secondary pick-off nodes located at 45 to the primary axes on the ring perimeter there is effectively no radial motion. if the gyro is now subjected to applied angular rate, as indicated in figure 13.3(d), then this causes the ring to be subjected to coriolis forces acting at a tangent to the ring perimeter on the primary axes. these forces in turn deform the ring causing radial motion at the secondary pick-off transducers. it is the motion detected at the secondary pick-off transducers which is proportional to the applied angular rate. the dsbsc signal is demodulated with respect to the primary motion, which results in a low frequency component which is proportional to angular rate. all of the gyro control circuitry is hosted in the asic. a block diagram of the asic functions is given in figure 1.1 in section 1. figure 13.3(a) figure 13.3(b) figure 13.3(c) figure 13.3(d) ppo+ ppo+ spo+ spo+ spo+ spo+ spo- spo- spo- spo- pd- pd- pd+ pd+ c.g 18398 c.g 18399 spo spo spo ppo ppo pd pd spo c.g 18400 zero radial motion spo cos2 vibration mode at 22khz ? c.g 18400 resultant radial motion f c = coriolis force f c f c f c applied rate ? crm200-00-0100-132 rev 5 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. page 33 precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com
crm200-00-0100-132 rev 5 page 34 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com 14 patent applications the following patent applications have been led for the pinpoint ? gyro sensors: patent application status us5226321 granted us5419194 granted us6698271 granted wo2009/119205 patent pending
? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com notes crm200-00-0100-132 rev 5 page 35
speci cation subject to change without notice. ? copyright 2011 silicon sensing systems limited all rights reserved. printed in england 04/2011 date 27/04/2011 crm200-00-0100-132 rev 5 dcr no. 620002648 silicon sensing systems limited clittaford road southway plymouth devon pl6 6de united kingdom t: +44 (0)1752 723330 f: +44 (0)1752 723331 w: pinpoint-gyro.com silicon sensing systems japan limited 1-10 fuso-cho amagasaki hyogo 6600891 japan t: +81 (0)6 6489 5868 f: +81 (0)6 6489 5919 w: pinpoint-gyro.com crm200-00-0100-132 rev 5 page 36 ? copyright 2011 silicon sensing systems limited. all rights reserved. silicon sensing is an atlantic inertial systems, sumitom o precision products joint venture company. speci cation subject to change without notice. precision navigation and pointing gyroscope crm200 technical datasheet www.pinpoint-gyro.com

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